WARM | Wide Angle and Resolution Metrology

Summary
WOOPTIX will upgrade to a 300mm field of view (FoV) metrology system a ready-to-market 50mm field of view Wooptix´s tool, based on a disruptive technology that measures the phase component of a beam of light (wavefront sensor) with a naked sensor, reaching a resolution orders of
magnitude higher than other wavefront sensors. This technology has been patented by the company. The scalability of the solution will present an outstanding business opportunity for WOOPTIX leading the company to achieve an amazing turnover rise. Our semiconductor metrology system is capable
of measuring the full 300mm silicon wafer geometry with a lateral resolution of 3.2µm and a height resolution of 0.3nm acquired in a single image snapshot in 100ms while capturing 15 million data points. The system works by using a standard digital image sensor to acquire the intensity of
the reflected, non-coherent light from the silicon surface at two sperate locations along the optical path.
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More information & hyperlinks
Web resources: https://cordis.europa.eu/project/id/190175162
Start date: 01-10-2022
End date: 30-09-2024
Total budget - Public funding: 6 357 210,00 Euro - 2 500 000,00 Euro
Cordis data

Original description

WOOPTIX will upgrade to a 300mm field of view (FoV) metrology system a ready-to-market 50mm field of view Wooptix´s tool, based on a disruptive technology that measures the phase component of a beam of light (wavefront sensor) with a naked sensor, reaching a resolution orders of
magnitude higher than other wavefront sensors. This technology has been patented by the company. The scalability of the solution will present an outstanding business opportunity for WOOPTIX leading the company to achieve an amazing turnover rise. Our semiconductor metrology system is capable
of measuring the full 300mm silicon wafer geometry with a lateral resolution of 3.2µm and a height resolution of 0.3nm acquired in a single image snapshot in 100ms while capturing 15 million data points. The system works by using a standard digital image sensor to acquire the intensity of
the reflected, non-coherent light from the silicon surface at two sperate locations along the optical path.

Status

SIGNED

Call topic

HORIZON-EIC-2021-ACCELERATOROPEN-01

Update Date

09-02-2023
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Horizon Europe
HORIZON.3 Innovative Europe
HORIZON.3.1 The European Innovation Council (EIC)
HORIZON.3.1.2 The Accelerator
HORIZON-EIC-2021-ACCELERATOROPEN-01 EIC Accelerator Open 2021