Summary
Silicon photonics has progressed enormously over the last 15 years: large microelectronics manufacturers and small companies are now working on the subject, with identified products. The reproducibility of micro and nanophotonic devices remains a central technological barrier, to be broken. The dimension errors of cleanroom devices are 1 to 10 nanometers (1%), limiting applications. We have discovered a technique that makes it possible to absorb these errors at the end of manufacturing, permanently. We can tune photonic resonators with an accuracy of 10^(-4), and make them strictly identical when necessary. In this POC project, the patented technique will be transposed on silicon devices of interest, in a simple configuration for manufacturers.
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| Web resources: | https://cordis.europa.eu/project/id/101123050 |
| Start date: | 01-12-2023 |
| End date: | 31-05-2025 |
| Total budget - Public funding: | - 150 000,00 Euro |
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Original description
Silicon photonics has progressed enormously over the last 15 years: large microelectronics manufacturers and small companies are now working on the subject, with identified products. The reproducibility of micro and nanophotonic devices remains a central technological barrier, to be broken. The dimension errors of cleanroom devices are 1 to 10 nanometers (1%), limiting applications. We have discovered a technique that makes it possible to absorb these errors at the end of manufacturing, permanently. We can tune photonic resonators with an accuracy of 10^(-4), and make them strictly identical when necessary. In this POC project, the patented technique will be transposed on silicon devices of interest, in a simple configuration for manufacturers.Status
SIGNEDCall topic
ERC-2023-POCUpdate Date
12-03-2024
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