Summary
Micro & Nano Electro-Mechanical Systems (MEMS/NEMS) have a huge impact on the market in different areas ranging from consumer to automotive. Nevertheless, their real potential is largely unexplored. This because their development is a long and very expensive process, which often requires long simulation steps. Moreover, arbitrary complex 3D structures cannot be even produced with standard micro/nano-fabrication techniques.
5D NanoPrinting project aims to overcome these limitations, providing an innovative integrated technological approach, based on two-photon 3D direct printing processes. Breakthrough processes for 3D Nano- MicroDevices (NEMS/MEMS) rapid prototyping will be developed, aspiring to become a novel gold standard for micro/nano-technologies, similarly to what 3D printing represented for manufacturing technologies in the last decade.
The approach will be based on new ad hoc-developed functional materials, polymerisable via two photon process, exploiting designed/tailored functional properties. In particular, to create complete NEMS/MEMS, a set of basic properties is required, including the possibility to have graded structural, patternable, conductive, and stimuli-responsive materials. Such complex functional materials, compatible with two photon lithographic process, have been not yet demonstrated; then, new suitable materials will be developed combining synthetic and nano-technological approaches. Expected innovation brought by the project will be not limited only to material science, but a great impact at levels of process and system is also expected.
Respect to traditional micro/nano-fabrication technologies, the proposed one will be specifically used for:
o Rapid prototyping, to test new principles and configurations before final device design
o Production of 3D complex or of customizable devices (parametric devices production, e.g. multi-axial nano-force sensors)
o Production of low numbers/high added value devices (e.g. cochlear implants).
5D NanoPrinting project aims to overcome these limitations, providing an innovative integrated technological approach, based on two-photon 3D direct printing processes. Breakthrough processes for 3D Nano- MicroDevices (NEMS/MEMS) rapid prototyping will be developed, aspiring to become a novel gold standard for micro/nano-technologies, similarly to what 3D printing represented for manufacturing technologies in the last decade.
The approach will be based on new ad hoc-developed functional materials, polymerisable via two photon process, exploiting designed/tailored functional properties. In particular, to create complete NEMS/MEMS, a set of basic properties is required, including the possibility to have graded structural, patternable, conductive, and stimuli-responsive materials. Such complex functional materials, compatible with two photon lithographic process, have been not yet demonstrated; then, new suitable materials will be developed combining synthetic and nano-technological approaches. Expected innovation brought by the project will be not limited only to material science, but a great impact at levels of process and system is also expected.
Respect to traditional micro/nano-fabrication technologies, the proposed one will be specifically used for:
o Rapid prototyping, to test new principles and configurations before final device design
o Production of 3D complex or of customizable devices (parametric devices production, e.g. multi-axial nano-force sensors)
o Production of low numbers/high added value devices (e.g. cochlear implants).
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More information & hyperlinks
| Web resources: | https://cordis.europa.eu/project/id/899349 |
| Start date: | 01-09-2020 |
| End date: | 28-02-2025 |
| Total budget - Public funding: | 3 583 800,00 Euro - 3 583 800,00 Euro |
Cordis data
Original description
Micro & Nano Electro-Mechanical Systems (MEMS/NEMS) have a huge impact on the market in different areas ranging from consumer to automotive. Nevertheless, their real potential is largely unexplored. This because their development is a long and very expensive process, which often requires long simulation steps. Moreover, arbitrary complex 3D structures cannot be even produced with standard micro/nano-fabrication techniques.5D NanoPrinting project aims to overcome these limitations, providing an innovative integrated technological approach, based on two-photon 3D direct printing processes. Breakthrough processes for 3D Nano- MicroDevices (NEMS/MEMS) rapid prototyping will be developed, aspiring to become a novel gold standard for micro/nano-technologies, similarly to what 3D printing represented for manufacturing technologies in the last decade.
The approach will be based on new ad hoc-developed functional materials, polymerisable via two photon process, exploiting designed/tailored functional properties. In particular, to create complete NEMS/MEMS, a set of basic properties is required, including the possibility to have graded structural, patternable, conductive, and stimuli-responsive materials. Such complex functional materials, compatible with two photon lithographic process, have been not yet demonstrated; then, new suitable materials will be developed combining synthetic and nano-technological approaches. Expected innovation brought by the project will be not limited only to material science, but a great impact at levels of process and system is also expected.
Respect to traditional micro/nano-fabrication technologies, the proposed one will be specifically used for:
o Rapid prototyping, to test new principles and configurations before final device design
o Production of 3D complex or of customizable devices (parametric devices production, e.g. multi-axial nano-force sensors)
o Production of low numbers/high added value devices (e.g. cochlear implants).
Status
SIGNEDCall topic
FETOPEN-01-2018-2019-2020Update Date
27-04-2024
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Organisations
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| FONDAZIONE ISTITUTO ITALIANO DI TECNOLOGIA (Coördinator)
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| CONSIGLIO NAZIONALE DELLE RICERCHE (CNR)
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| RIJKSUNIVERSITEIT GRONINGEN (RUG)
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| STMICROELECTRONICS SRL
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| Sant’Anna School of Advanced Studies - Scuola Superiore di Studi Universitari e di Perfezionamento...
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| TECHNISCHE UNIVERSITAET GRAZ (TU GRAZ)
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| Trinity College Dublin
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| UNIVERSITA DI PISA