InLineNano | In-Line Areal Surface Measurement for Micro and Nano Production

Summary
A new optical interferometry technology has been developed which delivers fast and high precision areal surface measurements for stepped and structured micro-nanoscale surfaces which cannot be measured by traditional techniques. The technology addresses the market need for high throughput, simple sample preparation and nanoscale accuracy combined with an affordable system cost. Furthermore, a unique vibration isolation innovation means that it has the flexibility to be applied both in-line and in-process. This project aims to validate its commercial potential as both a research and industrial metrology tool.
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More information & hyperlinks
Web resources: https://cordis.europa.eu/project/id/674655
Start date: 01-05-2015
End date: 31-10-2015
Total budget - Public funding: 71 429,00 Euro - 50 000,00 Euro
Cordis data

Original description

A new optical interferometry technology has been developed which delivers fast and high precision areal surface measurements for stepped and structured micro-nanoscale surfaces which cannot be measured by traditional techniques. The technology addresses the market need for high throughput, simple sample preparation and nanoscale accuracy combined with an affordable system cost. Furthermore, a unique vibration isolation innovation means that it has the flexibility to be applied both in-line and in-process. This project aims to validate its commercial potential as both a research and industrial metrology tool.

Status

CLOSED

Call topic

NMP-25-2014-1

Update Date

27-10-2022
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Horizon 2020
H2020-EU.2. INDUSTRIAL LEADERSHIP
H2020-EU.2.1. INDUSTRIAL LEADERSHIP - Leadership in enabling and industrial technologies
H2020-EU.2.1.2. INDUSTRIAL LEADERSHIP - Leadership in enabling and industrial technologies – Nanotechnologies
H2020-EU.2.1.2.0. INDUSTRIAL LEADERSHIP - Nanotechnologies - Cross-cutting call topics
H2020-SMEINST-1-2014
NMP-25-2014-1 Accelerating the uptake of nanotechnologies, advanced materials or advanced manufacturing and processing technologies by SMEs
H2020-EU.2.3. INDUSTRIAL LEADERSHIP - Innovation In SMEs
H2020-EU.2.3.1. Mainstreaming SME support, especially through a dedicated instrument
H2020-SMEINST-1-2014
NMP-25-2014-1 Accelerating the uptake of nanotechnologies, advanced materials or advanced manufacturing and processing technologies by SMEs