MAGALIGN | Magnetic alignment for high precision 3D assembly

Summary
In microelectronics, 3D integration and assembly definitely appears as a very efficient option to achieve highly integrated chips. It offers major benefits such as combining heterogeneous technologies, combining high-performance and low-power chips, increasing data transfer bandwidth in memory above logic circuits, etc. 3D assembly is realized by bonding two wafers or chips face to face on a wafer. In this bonding process, the number of interchips interconnects is limited by the accuracy of the alignment process. Presently, alignment methods rely on optical alignment techniques which offer ±0.2m resolution for wafer-to-wafer bonding or only ±1m resolution for die-to-wafer bonding. This is relatively poor and limit the density of interconnects and therefore the bandwidth of interchip communication. In this ERC PoC project, we intend to establish the viability of a novel magnetic alignment approach based on nanomagnetism and spin electronics which could yield unprecedented accuracy in alignment during wafer bonding.
The goals of MAGALIGN are i) to make a proof of concept of this novel alignment method, ii) optimize it and develop the design tools to exploit it, iii) Develop industrialization strategy.
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More information & hyperlinks
Web resources: https://cordis.europa.eu/project/id/963895
Start date: 01-01-2021
End date: 30-06-2022
Total budget - Public funding: - 150 000,00 Euro
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Original description

In microelectronics, 3D integration and assembly definitely appears as a very efficient option to achieve highly integrated chips. It offers major benefits such as combining heterogeneous technologies, combining high-performance and low-power chips, increasing data transfer bandwidth in memory above logic circuits, etc. 3D assembly is realized by bonding two wafers or chips face to face on a wafer. In this bonding process, the number of interchips interconnects is limited by the accuracy of the alignment process. Presently, alignment methods rely on optical alignment techniques which offer ±0.2m resolution for wafer-to-wafer bonding or only ±1m resolution for die-to-wafer bonding. This is relatively poor and limit the density of interconnects and therefore the bandwidth of interchip communication. In this ERC PoC project, we intend to establish the viability of a novel magnetic alignment approach based on nanomagnetism and spin electronics which could yield unprecedented accuracy in alignment during wafer bonding.
The goals of MAGALIGN are i) to make a proof of concept of this novel alignment method, ii) optimize it and develop the design tools to exploit it, iii) Develop industrialization strategy.

Status

CLOSED

Call topic

ERC-2020-POC

Update Date

27-04-2024
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Horizon 2020
H2020-EU.1. EXCELLENT SCIENCE
H2020-EU.1.1. EXCELLENT SCIENCE - European Research Council (ERC)
ERC-2020
ERC-2020-PoC