ERD

Novel approaches for halogen-free and sustainable etching of Silicon and Glass

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TECHNISCHE UNIVERSITAET CHEMNITZ - (Coördinator)

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FRAUNHOFER GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.

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LIONIX INTERNATIONAL BV

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PLASMASOLVE SRO

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UNIVERSITAET GRAZ (UNI GRAZ)

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VRIJE UNIVERSITEIT BRUSSEL (VUB)

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WARRANT GROUP S.R.L.

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