10ACe | 10 Angstrom CMOS exploration 01-05-2024 - 30-04-2027 Show more information Organisation CARL ZEISS SMS LTD
ID2PPAC | Integration of processes and moDules for the 2 nm node meeting Power Performance Area and Cost requirements 01-06-2021 - 31-12-2024 Show more information Organisation CARL ZEISS SMS LTD