Investigation of Predictive Maintenance for Semiconductor Manufacturing and its Impacts on the Supply Chain

This is a publication. If there is no link to the publication on this page, you can try the pre-formated search via the search engines listed on this page.

Authors: Daniel Fischer, Patrick Moder, Hans Ehm

Journal title: ICIT 2021 – 22nd IEEE International Conference on Industrial Technology

Journal publisher: Infineon Technologies AG

Published year: 2021