Comprehensive electrical analysis of metal/Al 2 O 3 /O-terminated diamond capacitance

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Authors: T. T. Pham, A. Maréchal, P. Muret, D. Eon, E. Gheeraert, N. Rouger, J. Pernot

Journal title: Journal of Applied Physics

Journal number: 123/16

Journal publisher: American Institute of Physics

Published year: 2018

Published pages: 161523

DOI identifier: 10.1063/1.4996114

ISSN: 0021-8979