Lattice performance during initial steps of the Smart-Cut™ process in semiconducting diamond: A STEM study

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Authors: J.C. Piñero, J. de Vecchy, D. Fernández, G. Alba, J. Widiez, L. Di Cioccio, F. Lloret, D. Araujo, J. Pernot

Journal title: Applied Surface Science

Journal number: 528

Journal publisher: Elsevier BV

Published year: 2020

Published pages: 146998

DOI identifier: 10.1016/j.apsusc.2020.146998

ISSN: 0169-4332