High resolution boron content profilometry at δ-doping epitaxial diamond interfaces by CTEM

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Authors: J.C. Piñero, F. Lloret, M.P. Alegre, M.P. Villar, A. Fiori, E. Bustarret, D. Araújo

Journal title: Applied Surface Science

Journal number: 461

Journal publisher: Elsevier BV

Published year: 2018

Published pages: 221-226

DOI identifier: 10.1016/j.apsusc.2018.07.097

ISSN: 0169-4332