Analysis by HR-STEM of the Strain Generation in InP after SiNx Deposition and ICP Etching

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Authors: M. Gutiérrez, D. F. Reyes, D. Araujo, J. P. Landesman, E. Pargon

Journal title: Journal of Electronic Materials

Journal number: 49/9

Journal publisher: Institute of Electrical and Electronics Engineers

Published year: 2020

Published pages: 5226-5231

DOI identifier: 10.1007/s11664-020-08312-6

ISSN: 0361-5235