Impact of methane concentration on surface morphology and boron incorporation of heavily boron-doped single crystal diamond layers

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Authors: Rozita Rouzbahani, Shannon S. Nicley, Danny E.P. Vanpoucke, Fernando Lloret, Paulius Pobedinskas, Daniel Araujo, Ken Haenen

Journal title: Carbon

Journal number: 172

Journal publisher: Pergamon Press Ltd.

Published year: 2021

Published pages: 463-473

DOI identifier: 10.1016/j.carbon.2020.10.061

ISSN: 0008-6223