Influence of ITO Sputter Deposition on Phosphorus-Doped Nanostructured Silicon Oxide Passivating Electron Contacts4

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Authors: J. Stuckelberger, P. Wyss, G. Nogay, J. Horze, C. Allebé, M. Despeisse, A. Ingenito, F.-J. Haug, P. Löper and C. Ballif

Journal title: SiliconPV 2018

Journal number: Wed, PS3, 3-B-18

Journal publisher: N/C

Published year: 2018