Ex situ phosphorus doped polysilicon films by plasma immersion ion implantation (PIII): Controlling and simplifying passivated contacts integration

This is a publication. If there is no link to the publication on this page, you can try the pre-formated search via the search engines listed on this page.

Authors: Antoine Veau, Thibaut Desrues, Audrey Morisset, Frank Torregrosa, Laurent Roux, Anne Kaminski-Cachopo, Quentin Rafhay, Sébastien Dubois

Journal title: 15th International Conference on Concentrator Photovoltaic Systems (CPV-15)

Journal publisher: AIP Publishing

Published year: 2019

Published pages: 040021

DOI identifier: 10.1063/1.5123848