PECVD-based layers for improved high temperature industrial solar cell processes

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Authors: C. Allebé, J.J. Diaz Leon, A. Ingenito, A. Descoeudres, G. Nogay, P. Wyss, Franz-Josef Haug, M. Despeisse, S. Nicolay, C. Ballif

Journal title: IEEE PVSC 2019

Journal number: Thu, Jun 20; 8:30AM, Area 4

Journal publisher: IEEE Electron Devices Society

Published year: 2019