Implementing transparent conducting oxides by DC sputtering on ultrathin SiOx / poly-Si passivating contacts

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Authors: Leonard Tutsch, Frank Feldmann, Jana Polzin, Christoph Luderer, Martin Bivour, Anamaria Moldovan, Jochen Rentsch, Martin Hermle

Journal title: Solar Energy Materials and Solar Cells

Journal number: 200

Journal publisher: Elsevier BV

Published year: 2019

Published pages: 109960

DOI identifier: 10.1016/j.solmat.2019.109960

ISSN: 0927-0248