Summary
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Authors: Markus Bauer (THEVA Dünnschichttechnik GmbH) Dr. Raphaela Burzler (THEVA Dünnschichttechnik GmbH) Dr. Veit Große (THEVA Dünnschichttechnik GmbH) Dr. Martin Keller (THEVA Dünnschichttechnik GmbH) Anne Bergen Dr. Marc Dhallé (University of Twente) Sander Wessel (University of Twente) Dr. Konstantin Yagotintsev (University of Twente) Dr. Nir Tzabar (Ariel University)
Journal title: MT25 Conference 2017
Journal number: 2017
Journal publisher: CERN
Published year: 2017