D 2.4

Summary
Process optimized high NA scanning objective
More information & hyperlinks
Web resources: https://ec.europa.eu/research/participants/documents/downloadPublic?documentIds=080166e5a4f876d1&appId=PPGMS
https://www.ec.europa.eu/research/participants/documents/downloadPublic?documentIds=080166e5a4f876d1&appId=PPGMS
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Sensor based adaptive laser micromachining using ultrashort pulse lasers for zero-failure manufacturing
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