Prediction of composition and crystalline structure of sputtered multi-component coatings by a Virtual Machine

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Authors: David Böhm, Thomas Schrefl, Andreas Eder, Christoph Eisenmenger-Sittner

Journal title: 18TH INTERNATIONAL CONFERENCE ON THIN FILMS & 18TH JOINT VACUUM CONFERENCE, Book of Abstracts

Journal number: 2020

Journal publisher: 18TH INTERNATIONAL CONFERENCE ON THIN FILMS & 18TH JOINT VACUUM CONFERENC

Published year: 2019

Published pages: 78