Prediction of composition, crystalline structure and microstructure of sputtered multi-component coatings by a Virtual Machine

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Authors: Chistoph Eisenmenger-Sittner, Andreas Eder, David Böhm, Thomas Schrefl

Journal title: 47th International Conference on Metalurgical Coatings and Thin Films

Journal number: 2021

Journal publisher: "47th International Conference on Metalurgical Coatings and Thin Films ""Prediction of"

Published year: 2021