High rate magnetron sputtering and computer supported modelling as a tool to create complex materials

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Authors: C. Eisenmenger-Sittner, D. Böhm, J. Kirschner

Journal title: 18TH INTERNATIONAL CONFERENCE ON THIN FILMS & 18TH JOINT VACUUM CONFERENCE, Book of Abstracts

Journal number: 2019

Journal publisher: 18TH INTERNATIONAL CONFERENCE ON THIN FILMS & 18TH JOINT VACUUM CONFERENCE

Published year: 2019

Published pages: 12