Prediction of composition and structural properties of sputtered multi-component coatings by a Virtual Machine

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Authors: Christoph Eisenmenger Sittner, Andreas Eder, David Böhm, Thomas Schrefl

Journal title: Seminar der Österreichischen Gesellschaft für Vakuumtechnik 2021

Journal number: 2021

Journal publisher: Österreichischen Gesellschaft für Vakuumtechnik 2021

Published year: 2021