Methane dissociation process in inductively coupled Ar/H 2 /CH 4 plasma for graphene nano-flakes production

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Authors: Antaryami Mohanta, Briac Lanfant, Mehari Asfaha, Marc Leparoux

Journal title: Applied Physics Letters

Journal number: 110/9

Journal publisher: American Institute of Physics

Published year: 2017

Published pages: 093109

DOI identifier: 10.1063/1.4977568

ISSN: 0003-6951