Analysis of InGaN surfaces after chemical treatments and atomic layer deposition of Al2O3 for µLED applications

Summary

This is a publication. If there is no link to the publication on this page, you can try the pre-formated search via the search engines listed on this page.

Authors: Corentin Le Maoult, David Vaufrey, François Martin, Eugénie Martinez, Emmanuel Nolot, Stéphane Cadot, Etienne Gheeraert

Journal title: Gallium Nitride Materials and Devices XV

Journal publisher: SPIE

Published year: 2020

Published pages: 46

DOI identifier: 10.1117/12.2544787

ISBN: 9781-510633247