Atomic layer deposition of MoOx and Al-doped ZnO for Si heterojunction solar cells

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Authors: Janne-Petteri Niemelä, Malgorzata Surowiec, Loris Barraud, Antoine Descoeudres, Nicolas Badel, Matthieu Despeisse, Gabriel Christmann, Sylvain Nicolay, Mariadriana Creatore

Journal title: TCO 2017: Transparent Conductive Oxides – Fundamentals and Applications

Journal number: TCO 2017: Transparent Conductive Oxides – Fundamentals and Applications

Journal publisher: TCO 2017: Transparent Conductive Oxides – Fundamentals and Applications

Published year: 2017