Advances in Sputter Deposition Technologies for Large Area, Thin Film Transparent Conducting Oxide Coatings

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Authors: J.D. Dutson, S.A. Thornley, P.J. Hockley, S.G. Rand, M.J. Thwaites

Journal title: European Materials Research Society Fall 2016 Meeting (E-MRS)

Journal number: European Materials Research Society Fall 2016 Meeting (E-MRS)

Journal publisher: pss – physica status solidi

Published year: 2016