Expanding thermal plasma CVD of ZnO:Al: plasma chemistry, growth modes and opto-electrical properties

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Authors: B.L. Williams, L.A. Duval, M. A. Ponomarev, M.C.M. van de Sanden, M. Creatore

Journal title: European Materials Research Society Fall 2016 Meeting (E-MRS)

Journal number: European Materials Research Society Fall 2016 Meeting (E-MRS)

Journal publisher: pss – physica status solidi

Published year: 2016