Development of Diamond and Silicon MEMS Sensor Arrays with Integrated Readout for Vapor Detection

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Authors: Maira Possas-Abreu, Farbod Ghassemi, Lionel Rousseau, Emmanuel Scorsone, Emilie Descours, Gaelle Lissorgues

Journal title: Sensors

Journal number: 17/6

Journal publisher: Multidisciplinary Digital Publishing Institute (MDPI)

Published year: 2017

Published pages: 1163

DOI identifier: 10.3390/s17061163

ISSN: 1424-8220