CAD-based metrology of freeform microlens arrays, FMLAs

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Authors: O. Fernández, T. Aderneuer, J. Chaves, R. Ferrini

Journal title: Proceedings Volume 11696, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XIV

Journal publisher: Society of Photo-Optical Instrumentation Engineers (SPIE)

Published year: 2021

DOI identifier: 10.1117/12.2579224