Integration of BEoL compatible 1T-1C FeFET memory cells into an established technology

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Authors: David Lehninger; Hannes Mähne; Tarek Ali; Raik Hoffmann; Ricardo Olivo; Maximilian Lederer; Konstantin Mertens; Thomas Kämpfe, Kati Biedermann, Matthias Landwehr, Andreas Heinig,Defu Wang, Yukai Shen, Kerstin Bernert, Steffen Thiem, Konrad Seidel

Journal title: 2022 IEEE International Memory Workshop (IMW)

Journal publisher: IEEE

Published year: 2022

DOI identifier: 10.1109/imw52921.2022.9779252