Low-Voltage Silicon Photonic MEMS Switch with Vertical Actuation

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Authors: H. Sattari, A.Y. Takabayashi, P. Edinger, P. Verheyen, K.B. Gylfason, W. Bogaerts, and N. Quack

Journal title: 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)

Journal publisher: IEEE

Published year: 2021

DOI identifier: 10.1109/mems51782.2021.9375168

ISBN: 978-1-6654-1912-3