Scalable Nano-Opto-Electromechanical Systems in Silicon Photonics

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Authors: N. Quack, A.Y. Takabayashi, H. Sattari, P. Edinger, K.B. Gylfason, G. Jo, F. Niklaus, P. Verheyen, M. Jezzini, U. Khan, I. Zand, W. Bogaerts

Journal title: IEEE IPC 2021, Vancouver, Canada

Journal publisher: IEEE

Published year: 2021

DOI identifier: 10.1109/ipc48725.2021.9593009

ISBN: 978-1-6654-1601-6