MORPHIC: MEMS enhanced silicon photonics for programmable circuits

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Authors: U. Khan, I. Zand, P. Edinger, G. Jo, S. J. Bleiker, A. Y. Takabayashi, C. Antony, M. Jezzini, G. Talli, H. Sattari, J. Lee, A. K. Malik, P. Verheyen, S. Kumar, C. L. Arce, M. Garcia, T. Jonuzi, J. Watte, N. Quack, F. Niklaus, K. B. Gylfason, and W. Bogaerts

Journal title: SPIE Photonics Europe 2022

Journal publisher: SPIE

Published year: 2022

DOI identifier: 10.1117/12.2631231

ISBN: 978-1-5106-5173-9