Silicon photonic MEMS phase shifter with us time constant built on a foundry platform

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Authors: P. Edinger, K. Kristinsson, C. Errando-Herranz, A.Y. Takabayashi, H. Sattari, N. Quack, P. Verheyen, W. Bogaerts, K.B. Gylfason

Journal title: CLEO 2021, San Jose, United States

Journal publisher: Optica

Published year: 2021

Published pages: STu2Q.1

DOI identifier: 10.1364/cleo_si.2021.stu2q.1

ISBN: 978-1-943580-91-0