Compact Integrated Silicon Photonic MEMS Power Coupler for Programmable Photonics

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Authors: A.Y. Takabayashi, D. Silva, H. Sattari, P. Edinger, P. Verheyen, K.B. Gylfason, W. Bogaerts, N. Quack

Journal title: 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS)

Journal publisher: IEEE

Published year: 2022

DOI identifier: 10.1109/mems51670.2022.9699708

ISBN: 978-1-6654-0911-7