Compact and low power silicon photonic components based on MEMS

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Authors: K.B. Gylfason, P. Edinger, C. Errando-Herranz, A.Y. Takabayashi, H. Sattari, N. Quack, P. Verheyen, W. Bogaerts

Journal title: SPIE Photonics West - OPTO

Journal publisher: SPIE

Published year: 2021

Published pages: 116970Y

DOI identifier: 10.1117/12.2582947

ISBN: 978-1-5106-4218-8