A Bistable Silicon Photonic Mems Phase Switch for Nonvolatile Photonic Circuits

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Authors: P. Edinger, A.Y. Takabayashi, C. Errando-Herranz, U. Khan, C. Antony,

Journal title: 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS)

Journal publisher: IEEE

Published year: 2022

Published pages: 216-219

DOI identifier: 10.1109/mems51670.2022.9699739

ISBN: 978-1-6654-0911-7