Automatic Defect Detection in Epitaxial Layers by Micro Photoluminescence Imaging

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Authors: Jacopo Frascaroli (1), Marta Tonini (1), Selene Colombo (1), Luisito Livellara (1), Luca Mariani (1), Paolo Targa (1), Roberto Fumagalli (1), Viktor Samu (2), Máté Nagy (2), Gábor Molnár (2), Áron Horváth (2), Zoltán Bartal (2), Zoltán Kiss (2),Tamás Sipőcz (2), Isabella Mica (1). (1) STMicroelectronics, Agrate Brianza, Italy (2) Semilab Semiconductor Physics Laboratory Company Ltd., B

Journal title: IEEE Transactions on Semiconductor Manufacturing

Journal number: Volume: 35, Issue: 3, August 2022

Journal publisher: Institute of Electrical and Electronics Engineers

Published year: 2022

Published pages: 540 - 545

DOI identifier: 10.1109/tsm.2022.3189847

ISSN: 0894-6507