Ni-silicide ohmic contacts on 4H-SiC formed by multi pulse excimer laser annealing

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Authors: P. Badalà (ST-I), I. Deretzis (CNR), S. Sanzaro (CNR), C. Bongiorno (CNR), G. Fisicaro (CNR), S. Rascunà (ST-I), G. Bellocchi (ST-I), A. Bassi (ST-I), M. Boscaglia (ST-I), D. Pagano (ST-I), P. Vasquez (ST-I), M. Enachescu (UPB), A. Alberti (CNR), A. La Magna (CNR)

Journal title: ICSCRM 2022 (International Conference on Silicon Carbide and Related Materials) 19th International Conference on Silicon Carbide and Related Materials

Journal publisher: ICSCRM

Published year: 2022

Published pages: Pag.42