Broadband Compact Single-Pole Double-Throw Silicon Photonic MEMS Switch

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Authors: A. Y. Takabayashi, H. Sattari, P. Edinger, P. Verheyen, K.B. Gylfason, W. Bogaerts, N. Quack

Journal title: J.MEMS

Journal publisher: IEEE

Published year: 2021

Published pages: 322-329

DOI identifier: 10.1109/jmems.2021.3060182

ISSN: 1941-0158