Wafer-level Hermetic Sealing of Silicon Photonic MEMS

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Authors: G. Jo, P. Edinger, S. Bleiker, X. Wang, A.Y. Takabayashi, H. Sattari, N. Quack, M. Jezzini, J. Lee, P. Verheyen, I. Zand, U. Khan, W. Bogaerts, G. Stemme, K. Gylfason, F. Niklaus

Journal title: Photonics Research

Journal publisher: Optica

Published year: 2022

Published pages: A14-A21

DOI identifier: 10.1364/prj.441215

ISSN: 2327-9125