Silicon photonic microelectromechanical phase shifters for scalable programmable photonics

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Authors: P. Edinger, A.Y. Takabayashi, C. Errando-Herranz, U. Khan, H. Sattari, P. Verheyen, W. Bogaerts, N. Quack, K.B. Gylfason

Journal title: Optics Letters

Journal publisher: Optica

Published year: 2021

Published pages: 5671-5674

DOI identifier: 10.1364/ol.436288

ISSN: 1539-4794