Analysis of Line-Edge Roughness Using EUV Scatterometry

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Authors: A. Fernández Herrero, F. Scholze, G. Dai, V. Soltwisch

Journal title: Nanomanufacturing and Metrology

Journal number: 2520811X

Journal publisher: Springer

Published year: 2022

Published pages: 149–158

DOI identifier: 10.1007/s41871-022-00126-w

ISSN: 2520-811X