Origination of free-form micro-optical elements using one- and two-photon grayscale laser lithography

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Authors: Bernhard Lamprecht, Andreas Ulm, Philip Lichtenegger, Claude Leiner, Wolfgang Nemitz, and Christian Sommer

Journal title: Applied Optics, Vol. 61, Issue 8

Journal number: 21553165

Journal publisher: Optica Publishing Group

Published year: 2022

DOI identifier: 10.1364/ao.448897

ISSN: 2155-3165