Enhanced Conductivity and Microstructure in Highly Textured TiN1−x/c‑Al2O3 Thin Films

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Authors: Alexander Zintler, Robert Eilhardt, Stefan Petzold, Sankaramangalam Ulhas Sharath, Enrico Bruder, Nico Kaiser, Lambert Alff, and Leopoldo Molina-Luna

Journal title: ACS Omega 2022, 7, 2041−2048

Journal number: 24701343

Journal publisher: American Chemical Society

Published year: 2022

DOI identifier: 10.1021/acsomega.1c05505

ISSN: 2470-1343