Monolithic integration of a multispectral optical interference filter array on thin film amorphous Si photodiodes

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Authors: K. Nicolaidou, H.M.Oliveira, S.Cardoso, P.P.Freitas, V.Chu and J.P.Conde

Journal title: IEEE Sensors Journal

Journal number: 15581748

Journal publisher: IEEE

Published year: 2022

Published pages: 5636-5643

DOI identifier: 10.1109/jsen.2022.3150228

ISSN: 1558-1748