MFIG - a Mass Filtered Ion Gauge

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Authors: Bekman, H.H.P.T. Westland, Y. Elstgeest, T.H. Mechielsen, T.W. Haye, M.J. Emmelkamp, J. Molkenboer, F.T. Koster, N.B. Lensen, H.A.

Journal publisher: IVC-22, 22nd International Vacuum Congress (https://ivc22.org/)

Published year: 2022

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