Impact of Ferroelectric Layer Thickness on Reliability of Back-End-of-Line-Compatible Hafnium Zirconium Oxide Films

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Authors: Ayse Sünbül, David Lehninger, Raik Hoffmann, Ricardo Olivo, Aditya Prabhu, Fred Schöne, Kati Kühnel, Moritz Döllgast, Nora Haufe, Lisa Roy, Thomas Kämpfe, Konrad Seidel, Lukas M. Eng

Journal title: Adv. Eng. Mater.2022, 2201124

Journal number: 15272648

Journal publisher: Wiley Online Libray

Published year: 2022

DOI identifier: 10.1002/adem.202201124

ISSN: 1527-2648