Study of plasma etching impact on chemoepitaxy directed self-assembly

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Authors: Maria Gabriela Gusmão Cachoa), Khatia Benotmane, Aurélie Le Pennec, Charlotte Bouet, Patricia Pimenta-Barros, Guido Rademaker, Maxime Argoud, Raluca Tiron, and Nicolas Possémé

Journal title: Journal of Vacuum Science and Technology A

Journal publisher: American Institute of Physics

Published year: 2021

DOI identifier: 10.1116/6.0000850

ISSN: 0734-2101